· Table ye kë ye cɔl three-layer clamped cellular support structure, ye luui në Icr17 high conductive magnetic stainless steel

· Vibration insulation material using precision type professional damping vibration reducer and national standard damping vibration insulation mat

· Fɛɛrɛ̈ɛ̈ɛ̈ɛ̈r ye cɔk tɔ̈u ka tɔ̈u ka tɔ̈u ka tɔ̈u ka tɔ̈u ka tɔ̈u ka tɔ̈u 3Hz

· A lëu bɛ̈n looi bɛ̈n looi bɛ̈n looi bɛ̈n looi bɛ̈n looi bɛ̈n looi bɛ̈n looi (LFont,TFont,VFont, etc.) Precision Optical Platform

· A ka dɔ̈ŋ 0.05mm/㎡

· Kä ye cɔl surface roughness is less than 0.8um ~ 1.6um

· Frequency 3Hz ~ 6Hz

· Amplitude ka bon 5um

· Repeat positioning accuracy+0.05mm